Advanced Technology > Cleanrooms
KLA Tencor-Milpitas

ACCO was design-build mechanical contractor for the 560,000 sq. ft. KLA-Tencor Campus in Milpitas, CA. This facility consists of 480,000 sq. ft. of office building space and more than 80,000 sq. ft. of Class 10, 100, 1,000 and 10,000 clean rooms in the three buildings.

The office mechanical equipment consisted of large rooftop packages and hot water boilers for a VAV reheat system. For the clean rooms, the system consisted of ducted HEPAs and chilled water air handlers in the single story clean rooms and fan-powered HEPAs with chilled water recirculation units for the clean rooms located in the 2-story structures. A steam humidification system was provided for the larger air handling system and self-contained humidifiers were provided for the smaller clean rooms. The project has a DDC control system.

Project Data

  • 2,380 Total Tons of Cooling
  • 560,000 Sq. Ft. of Usable Space

Project Team

  • Owner - KLA Tencor,
  • Architect - RMW
  • Engineer - Practicon & Associates
  • General Contractor - DPR

 
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